ABSTRACT
We have designed, fabricated, and tested a MEMS-based impedance biosensor for accurate and rapid detection of severe acute respiratory syndrome coronavirus 2 (SARS-COV-2) using of clinical samples. The device consists of focusing region that concentrate low quantities of the virus present in the samples to a detectable threshold, trap region hat maximize the captured virus, and detection region to detect the virus with high selectivity and sensitivity, using an array of interdigitated electrodes (IDE) coated with a specific antibody. Changes in the impedance value due to the binding of the SARS-COV-2 antigen to the antibody will indicate positive or negative result. The device was able to detect inactivated SARS-COV-2 antigen present in phosphate buffer saline (PBS) with a concentration as low as 50 TCID50/ml in 30 minutes. In addition, the biosensor was able to detect SARS-COV-2 in clinical samples (swabs) with a sensitivity of 84 TCID50/ml, also in 30 minutes. © 2023 IEEE.